b.s., qing dao university, mechanical engineering, 2000
m.s., northwestern polytechnical university, mechanical engineering, 2003
ph.d., northwestern polytechnical university, mechanical engineering, 2007
1. optical mems
2. micro/nano fabrication
3. power mems
1. qiao da-yong, kang bao-peng, liu yao-bo, a resonance scanning grating based on soi for microspectrometer application, laser physics, 2013, 23(3): 035601
2.da-yong qiao, xiao-pei zheng, determination of residual stress in deep submicron thickﬁlms by the critical buckling technique of annular thin plates. microsystem technologies. 2012, 18(3): 277-282.
3. da-yong qiao, xue-jiao chen, yong ren and wei-zheng yuan, a nuclear micro battery based on sic schottky barrier diode, journal of mems, 2011, 20 (3):685-690.
4. da-yong qiao, song-jie wang and wei-zheng yuan, a continuous-membrane micro deformable mirror based on anodic bonding of soi to glass wafer, microsystem technologies, 2010, 16(10): 1765-1769
5. qiao da-yong, yuan wei-zheng, gao peng, yao xian-wang, zang bo, zhang lin, guo hui, zhang hong-jian, demonstration of a 4h sic betavoltaic nuclear battery based on schottky barrier diode, chin phys lett, 2008, 25(10): 3798-3800.
6. da-yong qiao, wei-zheng yuan, yi-ting yu, qing liang, zhi-bo ma, xiao-ying li, the residual stress induced buckling of annular thin plates and its application in residual stress measurement of thin films, sensors & actuators: a, 2008, 143(2): 409-414.
7. qiao dayong, yuan weizheng, li xiaoying, a two-beam method for extending the working range of electrostatic parallel-plate micro actuators, journal of electrostatics, 2007, 65(4): 256-263.
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